ROBOT TRANSFER SYSTEM FOR WAFER PROCESSING

被引：0
|
作者：
SHAUM, LE
机构：
来源：
SOLID STATE TECHNOLOGY | 1984年 / 27卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：155 / 158
页数：4
相关论文
共 50 条
  • [1] System Analysis and Design of Gripping Device for Wafer Transfer Robot
    Zhang, Peng
    Zhuang, Xianwen
    Hao, Lina
    Liu, Hongtao
    [J]. MECHATRONICS AND INFORMATION TECHNOLOGY, PTS 1 AND 2, 2012, 2-3 : 314 - 319
  • [2] Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors
    Kim, Hyungjong
    [J]. SENSORS, 2022, 22 (21)
  • [3] Development of Automatic Wafer Centering System for Vacuum Transfer Robot using for Semiconductor Manufacturing
    Chung, Myung-Jin
    Lee, Sung-Jik
    [J]. MACHINE DESIGN AND MANUFACTURING ENGINEERING III, 2014, : 782 - 785
  • [4] An Integrated System of Detecting End-effector Motion States and Wafer Stick-slip on a Wafer Transfer Robot
    Liu, Yanjie
    Han, Haijun
    Sun, Lining
    Li, Kang
    Liu, Tao
    [J]. 2016 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, 2016, : 2570 - 2575
  • [5] Wafer-transfer robot for use in ultrahigh vacuum
    Kanetomo, M
    Kashima, H
    Suzuki, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1385 - 1388
  • [6] Accurate and steady control on trajectory tracking for the wafer transfer robot
    Liu, Yanjie
    Cao, Yumei
    Sun, Lining
    Zheng, Xiaofei
    [J]. INDUSTRIAL ROBOT-AN INTERNATIONAL JOURNAL, 2010, 37 (06) : 552 - 561
  • [7] AUTOMATIC MASS WAFER TRANSFER SYSTEM
    不详
    [J]. SOLID STATE TECHNOLOGY, 1982, 25 (01) : 41 - 42
  • [8] Research, design and experiment of end effector for wafer transfer robot
    Liu, Yanjie
    Xu, Meng
    Cao, Yumei
    [J]. INDUSTRIAL ROBOT-THE INTERNATIONAL JOURNAL OF ROBOTICS RESEARCH AND APPLICATION, 2012, 39 (01): : 79 - 91
  • [9] Development of Micro-fiber Array with High-friction and Low-adhesion for Wafer Transfer on a Wafer Transfer Robot
    Han, Haijun
    Liu, Yanjie
    Sun, Lining
    [J]. 2016 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, 2016, : 1584 - 1589
  • [10] Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition
    Song, Kai-Tai
    Ou, Song-Qing
    Yang, Cheng-An
    Sun, Yu-Xuan
    Kang, Li-Ren
    Wang, Zhen-Yu
    Wang, Yu-Shin
    Lu, Pei-Chun
    Ko, Chun-Long
    Chen, Yao Hsiang
    [J]. IFAC PAPERSONLINE, 2019, 52 (15): : 627 - 632
12345