THE HELIOS-1 COMPACT SUPERCONDUCTING STORAGE-RING X-RAY SOURCE

被引:9
|
作者
WILSON, MN
SMITH, AIC
KEMPSON, VC
TOWNSEND, MC
SCHOUTEN, JC
ANDERSON, RJ
JORDEN, AR
SULLER, VP
POOLE, MW
机构
[1] SERC LAB,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND
[2] SERC,DARESBURY LAB,DIV SYNCHROTRON RADIAT ACCELERATOR,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND
关键词
Facilities - Mathematical models - Storage rings - Superconducting magnets - Synchrotron radiation - X ray production;
D O I
10.1147/rd.373.0351
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
The basic properties of synchrotron radiation are described, the design of storage rings to produce synchrotron radiation is outlined, and the criteria for matching storage ring design to the needs of X-ray lithography are discussed. Simple scaling laws are presented showing the benefits for a storage ring of using the higher fields which superconducting magnets are able to provide. Helios 1 is a compact superconducting storage ring built by Oxford instruments for installation at the IBM Advanced Lithography Facility (ALF). Design choices for superconducting rings are discussed, and the design and construction of Helios are described. Test results from the initial commissioning of Helios at Oxford are presented, but the main data on its performance when installed at ALF are given in another paper in this issue.
引用
收藏
页码:351 / 371
页数:21
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