PREPARATION OF NEARLY STOICHIOMETRIC SUPERCONDUCTING Y-BA-CU-O FILMS BY AN MOCVD TECHNIQUE USING OZONE

被引:17
|
作者
OHNISHI, H [1 ]
HARIMA, H [1 ]
KUSAKABE, Y [1 ]
KOBAYASHI, M [1 ]
HOSHINOUCHI, S [1 ]
TACHIBANA, K [1 ]
机构
[1] KYOTO INST TECHNOL, DEPT ELECTR & INFORMAT SCI, SAKYO KU, KYOTO 606, JAPAN
关键词
CVD as-grown; Metalorganic; Ozone; Superconductor; Thin film; YBaCuO;
D O I
10.1143/JJAP.29.L2041
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting Y-Ba-Cu-O films of nearly stoichiometric composition (Y:Ba:Cu=1:2:3.6) were prepared by an MOCVD technique on MgO(100) infstrates at 650°C without postannealing. By introducing ozone into the reactor, we obtained a film with higher zero resistive temperature (75 K) and better surface morphology and c-axis orientation, compared to a film of the same composition prepared without ozone. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L2041 / L2044
页数:4
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