PHASE-SHIFTER CALIBRATION IN PHASE-SHIFTING INTERFEROMETRY

被引：231
|
作者：
CHENG, YY
WYANT, JC
机构：
来源：
APPLIED OPTICS | 1985年 / 24卷 / 18期
关键词：
D O I：
10.1364/AO.24.003049
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：3049 / 3052
页数：4
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