THE EVALUATION OF SOME DISORDER PARAMETERS OF RF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-CARBON FILMS A-C-H

被引：16
|
作者：
FABISIAK, K
ROZPLOCH, F
WIECZOREK, J
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1988年 / 21卷 / 06期
关键词：
D O I：
10.1088/0022-3727/21/6/021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：995 / 998
页数：4
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