CHARACTERIZATION OF SPIN-ON-GLASS USING FOURIER-TRANSFORM INFRARED-SPECTROSCOPY

Spin-on-glass (SOG) has been characterized using process control techniques that provide in-line monitoring capability. Film composition changes have been observed for different anneal temperatures (300°-1000°C) and ambients (oxygen. and nitrogen). Fourier transform infrared (FTIR) spectroscopy and x-ray photoelectron spectroscopy (XPS) show a reduction in organic content in the film after annealing at temperatures above 500°C. Area integration under the silicon dioxide peak in the FTIR spectrum indicates compositional changes begin at a critical temperature identified as approximately 500°C. Both FTIR and XPS data show further densification of SOG takes place at higher temperature anneals (700°-1000°C). Refractive index and film stress measurement data correlate well with FTIR and XPS results. © 1990, The Electrochemical Society, Inc. All rights reserved.