OPTICAL-SYSTEM FOR MEASURING THE PROFILES OF SUPER-SMOOTH SURFACES

被引：49
|
作者：
DOWNS, MJ
MCGIVERN, WH
FERGUSON, HJ
机构：
来源：
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1985年 / 7卷 / 04期
关键词：
D O I：
10.1016/0141-6359(85)90005-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：211 / 215
页数：5
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