PIEZORESISTIVE ELEMENTS OF POLYCRYSTALLINE SEMICONDUCTOR THIN-FILMS

被引：15

作者：

ONUMA, Y ^{[1
]}

KAMIMURA, K ^{[1
]}

HOMMA, Y ^{[1
]}

机构：

[1] NAGANO KEIKI CO LTD,UEDA,NAGANO 386,JAPAN

来源：

SENSORS AND ACTUATORS | 1988年 / 13卷 / 01期

关键词：

D O I：

10.1016/0250-6874(88)85030-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：71 / 77

页数：7

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