BIOMEDICAL PRESSURE SENSOR USING BURIED PIEZORESISTORS

被引：19
|
作者：
ESASHI, M [1 ]
KOMATSU, H [1 ]
MATSUO, T [1 ]
机构：
[1] TOHOKU UNIV,DEPT ELECTR ENGN,SENDAI,MIYAGI 980,JAPAN
来源：
SENSORS AND ACTUATORS | 1983年 / 4卷 / 04期
关键词：
D O I：
10.1016/0250-6874(83)85065-3
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：537 / 544
页数：8
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