STRUCTURAL AND MAGNETIC-PROPERTIES OF FE-N GRADIENT THIN-FILMS

被引：8
|
作者：
JIANG, EY [1 ]
SUN, DC [1 ]
LIU, H [1 ]
BAI, HL [1 ]
ZHANG, XX [1 ]
机构：
[1] TSING HUA UNIV,DEPT MAT SCI & ENGN,BEIJING 100084,PEOPLES R CHINA
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1995年 / 140卷
关键词：
D O I：
10.1016/0304-8853(94)01568-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Fe-N gradient thin films are fabricated by a facing targets sputtering (FIS) system. Rutherford backscattering spectrometry shows that the concentration of Fe atoms or N atoms varies gradually from the substrate to the surface of the film. The Fe-N gradient films contain crystal phases of xi-Fe2N, epsilon-FexN (2 < x less than or equal to 3), gamma'-Fe4N and alpha''-Fe16N2, and amorphous FeN as well, according to different sputtering conditions.
引用
收藏
页码：719 / 720
页数：2
相关论文
共 50 条
  • [1] MAGNETIC AND STRUCTURAL-PROPERTIES OF SPUTTERED FE-N THIN-FILMS
    BOBO, JF
    VERGNAT, M
    CHATBI, H
    HENNET, L
    LENOBLE, O
    BAUER, P
    PIECUCH, M
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 140 : 717 - 718
  • [2] MAGNETIC-PROPERTIES AND STRUCTURE OF AL/FE-N PERIODIC MULTILAYER THIN-FILMS
    BARNARD, JA
    TAN, M
    WAKNIS, A
    HAFTEK, E
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) : 5298 - 5300
  • [3] SOFT MAGNETIC-PROPERTIES OF FE-N AND FE-SI-N THIN-FILMS SPUTTERED IN (AR+N2) PLASMA
    TAKAHASHI, M
    SHOJI, H
    SHIMATSU, T
    KOMABA, H
    WAKIYAMA, T
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 1503 - 1505
  • [4] MAGNETIC-PROPERTIES OF AMORPHOUS Y-FE-N THIN-FILMS
    COURTOIS, D
    NOZIERES, JP
    GIVORD, D
    JOURNAL OF ALLOYS AND COMPOUNDS, 1994, 209 : 231 - 234
  • [5] FE-N GRADIENT THIN-FILMS PREPARED BY FACING TARGETS SPUTTERING
    SUN, DC
    JIANG, EY
    LIU, H
    MING, SL
    LIN, C
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (01) : 4 - 6
  • [6] The structure and magnetic properties of Fe-N thin films
    周剑平
    常香荣
    李福燊
    方光旦
    李丹
    乔利杰
    赵春生
    顾有松
    田中卓
    宋庆山
    Science China Mathematics, 2002, (02) : 255 - 263
  • [7] MAGNETIC-PROPERTIES OF FE-N/SI-N MULTILAYER FILMS
    HOSHI, Y
    NAOE, M
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 2344 - 2346
  • [8] Structural and magnetic properties of nanocrystalline Fe-N thin films and their thermal stability
    Wang, L. L.
    Wang, X.
    Zheng, W. T.
    Ma, N.
    Li, H. B.
    Guan, Q. F.
    Jin, D. H.
    Zong, Z. G.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2007, 443 (1-2) : 43 - 47
  • [9] The structure and magnetic properties of Fe-N thin films
    Zhou, JP
    Li, D
    Gu, YS
    Chang, XR
    Zhao, CH
    Li, FH
    Qiao, LJ
    Tian, ZH
    Fang, GD
    Song, QH
    SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY, 2002, 45 (02): : 255 - 263
  • [10] The structure and magnetic properties of Fe-N thin films
    周剑平
    常香荣
    李福燊
    方光旦
    李丹
    乔利杰
    赵春生
    顾有松
    田中卓
    宋庆山
    ScienceinChina,SerA., 2002, Ser.A.2002 (02) : 255 - 263
12345