OUTGASSING CHARACTERISTICS OF SOME MATERIALS FOR THE GAS-LINES USED IN SEMICONDUCTOR MANUFACTURING

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作者：
SUCCI, M
SCIUCCATI, F
FERRARIO, B
机构：
来源：
9TH INTERNATIONAL SYMPOSIUM ON CONTAMINATION CONTROL : EXPLORING WORLD PARTNERSHIPS IN TECHNOLOGY | 1988年
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：237 / 243
页数：7
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