DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM

被引：1
|
作者：
YAMADA, A
SAKAMOTO, K
YAMAZAKI, S
KOBAYASHI, K
SAGO, S
OONO, M
WATANABE, H
YASUDA, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587521
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3404 / 3408
页数：5
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