OPTICAL AND STRUCTURAL-PROPERTIES OF LPCVD SILICON FILMS

被引：0
|
作者：
PROUST, N
BISARO, R
MAGARINO, J
ZELLAMA, K
机构：
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
[2] UNIV PARIS 07,ENS,PHYS SOLIDES GRP,F-75221 PARIS 05,FRANCE
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C87 / C87
页数：1
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