MAGNETRON SPUTTERED THIN TUNGSTEN FILMS

被引：0
|
作者：
KOSSOWSKY, R
BOURG, H
机构：
[1] WESTINGHOUSE RES LABS,PITTSBURGH,PA 15235
[2] WESTINGHOUSE ELECT CORP,BALTIMORE,MD 21203
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C286 / C286
页数：1
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