BIAS EFFECTS ON MORPHOLOGY AND GROWTH-RATE OF GLOW-DISCHARGE A-SI H FILMS IN A TRIODE SYSTEM

被引：3
|
作者：
PYON, RG
AOZASA, M
ANDO, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 07期
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D O I：
10.1143/JJAP.25.944
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：944 / 949
页数：6
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