THE OXIDATION OF POLYCRYSTALLINE TANTALUM AT LOW-PRESSURES AND LOW-TEMPERATURES

被引：12
|
作者：
PALACIO, C
MARTINEZDUART, JM
机构：
来源：
THIN SOLID FILMS | 1982年 / 90卷 / 01期
关键词：
D O I：
10.1016/0040-6090(82)90072-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：63 / 67
页数：5
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