GROWTH OF CUBIC BORON-NITRIDE BY CHEMICAL-VAPOR-DEPOSITION AND HIGH-PRESSURE HIGH-TEMPERATURE SYNTHESIS

被引:49
|
作者
DEMAZEAU, G [1 ]
机构
[1] UNIV BORDEAUX 1,ENSCPB,LCS,F-33405 TALENCE,FRANCE
关键词
D O I
10.1016/0925-9635(93)90052-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
With respect to its exceptional physicochemical properties, cubic boron nitride (c-BN) is closely related to diamond; it is a III-V compound with potential electronic developments in the near future. The high thermal stability of c-BN and its ability to avoid being transferred into ferrous alloys during high-speed tooling make it a sought after material. A general survey of the two main routes used for synthesis is presented: the high-pressure high-temperature synthesis (HP-HT) and chemical vapor deposition (CVD). The former is mainly used for the production of microcrystallites for dense ceramics, PCBN products or single crystals. Since c-BN can be n or p doped more easily than diamond, the second route is now being developed to prepare doped thin films for microelectronic applications. A projection of the developments of c-BN is given on the basis of potential applications in different industrial domains. In addition, the future of c-BN is analyzed on the basis of the latest thermodynamic calculations claiming that this structural form is stable at normal pressure if the temperature is lower than 1000-degrees-C.
引用
收藏
页码:197 / 200
页数:4
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