CMOS ON BURIED NITRIDE - A VLSI SOI TECHNOLOGY

被引:51
|
作者
ZIMMER, G
VOGT, H
机构
关键词
D O I
10.1109/T-ED.1983.21331
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1515 / 1520
页数:6
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