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CYLINDRICAL MAGNETRON SPUTTERING FOR THE PRODUCTION OF WEAR-RESISTANT AND DURABLE OVERLAYS OF UNIFORM THICKNESS FOR JOURNAL BEARINGS FOR APPLICATION IN HIGH-PERFORMANCE COMBUSTION ENGINES
被引：0
|作者：
HOLLAND, J
LINNENBRUGGER, A
机构：
[1] Institut für Reibungstechnik und Maschinenkinetik, Technische Universität Clausthal, 38678 Clausthal-Zellerfeld
来源：
关键词：
Coatings - Cylinders (shapes) - Internal combustion engines - Journal bearings - Magnetrons - Sputter deposition - Substrates - Tempering - Tribology - Wear resistance;
D O I：
10.1016/0257-8972(93)90149-I
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ;
080502 ;
摘要：
With a short analysis of the tribological system, the special demands on the overlays Of journal bearings in combustion engines are pointed out. Special aspects of the sputter deposition of bearing shells for high performance combustion engines, which can replace electroplated or roll-bonded layers, for example the disadvantages of the use of planar magnetrons, are mentioned. Then the development of small cylindrical sources with a magnetic system for high deposition rates and target utilization is described, and the requirements for tempering of the substrates during coating are made clear.
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页码：541 / 544
页数：4
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