OPTICAL CHARACTERIZATION OF ION-IMPLANTED GLASS-SURFACE LAYERS WITH SURFACE-PLASMON RESONANCE METHOD

被引：4
|
作者：
DAI, Y [1 ]
OKAMOTO, T [1 ]
YAMAGUCHI, I [1 ]
IWAKI, M [1 ]
机构：
[1] INST PHYS & CHEM RES, WAKO, SAITAMA 35101, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 9A期
关键词：
SURFACE PLASMON RESONANCE; ION IMPLANTATION; OPTICAL CHARACTERIZATION; REFRACTIVE INDEX; FLUORIDE GLASS;
D O I：
10.1143/JJAP.32.L1269
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The feasibility of a surface plasmon resonance method for optical characterization of ion-implanted glass surface layers is demonstrated. Resonance curves were measured for silica and fluoride glass implanted with various nonmetal and metal ions and compared with those of unimplanted samples. Regardless of their thinness and unclear depth profile of refractive index, the effect of ion implantation on the refractive index and absorption of the glass surface layers could be quantitatively evaluated by curve fitting method.
引用
收藏
页码：L1269 / L1272
页数：4
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