ROUND ROBIN STUDY OF IMPURITY ANALYSIS IN GALLIUM-ARSENIDE USING SECONDARY ION MASS-SPECTROMETRY

被引：28
|
作者：
HOMMA, Y
KUROSAWA, S
YOSHIOKA, Y
SHIBATA, M
NOMURA, K
NAKAMURA, Y
机构：
[1] MATSUSHITA TECHNORES INC, MORIGUCHI, OSAKA 570, JAPAN
[2] SUMITOMO ELECT IND LTD, RES & DEV GRP, OSAKA 554, JAPAN
[3] MITSUBISHI MET CORP, CENT RES INST, OMIYA, SAITAMA 330, JAPAN
[4] NIPPON MIN CORP, CENT RES LABS, TODA, SAITAMA 335, JAPAN
来源：
ANALYTICAL CHEMISTRY | 1985年 / 57卷 / 14期
关键词：
D O I：
10.1021/ac00291a041
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：2928 / 2934
页数：7
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