SUBNANOSECOND PULSED LASER ANNEALING OF SE-IMPLANTED INP

被引：6
|
作者：
TELL, B
BJORKHOLM, JE
BEEBE, ED
机构：
来源：
APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 07期
关键词：
D O I：
10.1063/1.94473
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：655 / 657
页数：3
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