NIFE FILMS DEPOSITED BY SPUTTER GUN AND APPLICATIONS TO BUBBLE-DEVICES

被引：5
|
作者：
TAO, LJ [1 ]
AHN, KY [1 ]
LIN, BJ [1 ]
MOLZEN, WW [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
THIN SOLID FILMS | 1976年 / 37卷 / 03期
关键词：
D O I：
10.1016/0040-6090(76)90610-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：423 / 427
页数：5
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