A STYLUS INSTRUMENT FOR ROUGHNESS AND PROFILE MEASUREMENT OF ULTRA-FINE SURFACES

被引：4
|
作者：
GARRATT, JD
NETTLETON, DJ
机构：
[1] Leicester, LE4 7JQ
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1992年 / 32卷 / 1-2期
关键词：
D O I：
10.1016/0890-6955(92)90083-S
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper describes a production instrument which will measure very fine surface texture. It is a stylus profiling instrument, namely Nanostep, based on the NPL Nanosurf 2, which provides thermal stability in its "Zerodur" construction and a dynamic range of 50 nm to 50mm in its slideway/carriage/drive design. Nanostep performance is discussed in respect of noise, straightness, profile and start position repeatability, the measurement of different grades of silicon slice and a very small step.
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页码：233 / 238
页数：6
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