STUDY OF THE POROSITY OF ALUMINUM NITRIDE FILMS ON METAL

被引：0
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作者：
AVDOSHIN, VP
VASILENKO, YA
KOCHURIKHIN, VE
SLEPTSOV, VV
机构：
来源：
ZHURNAL FIZICHESKOI KHIMII | 1984年 / 58卷 / 06期
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D O I：
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：1501 / 1505
页数：5
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