PLASMA-ETCHING OF THIN-LAYERS OF ORGANIC POLYMERS - ADDITION OF AROMATIC-COMPOUNDS

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作者：

EGGERT, L

JACOB, S

ABRAHAM, W

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ZEITSCHRIFT FUR CHEMIE | 1990年 / 30卷 / 10期

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

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页码：381 / 382

页数：2

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