NBN FILMS PREPARED BY MAGNETRON SPUTTERING

被引：11
|
作者：
AKUNE, T
SAKAMOTO, N
SHIBUYA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 05期
关键词：
D O I：
10.1143/JJAP.21.772
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：772 / 775
页数：4
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