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- [4] Breaking-In a Pad for Scratch-Free, Cu Chemical-Mechanical Polishing (CuCMP) CHEMICAL MECHANICAL POLISHING 11, 2010, 33 (10): : 115 - 136
- [6] LAPPING AND POLISHING OF SEMI-CONDUCTOR SILICON SLICES - A VIRTUALLY SCRATCH-FREE FINISH AT 500X METALLURGIA, 1968, 77 (461): : 119 - &
- [8] A SOFT-TOUCH SURFACE DESIGNED FOR SCRATCH-FREE MOTION-PICTURE FILM PROCESSING JOURNAL OF THE SOCIETY OF MOTION PICTURE TELEVISION ENGINEERS, 1970, 79 (08): : 712 - &
- [9] A SOFT-ROLLER SURFACE DESIGN FOR SCRATCH-FREE MOTION-PICTURE FILM PROCESSING JOURNAL OF THE SOCIETY OF MOTION PICTURE TELEVISION ENGINEERS, 1968, 77 (04): : 386 - &
- [10] Nano Size Cerium Hydroxide Slurry for Scratch-Free CMP Process 2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT), 2014, : 22 - 24