THE SURFACE-CHEMISTRY OF THE THERMAL-CRACKING OF SILANE ON SILICON (111)

被引：44
|
作者：
FARNAAM, MK [1 ]
OLANDER, DR [1 ]
机构：
[1] UNIV CALIF BERKELEY,COLL ENGN,DEPT NUCL ENGN,BERKELEY,CA 94720
来源：
SURFACE SCIENCE | 1984年 / 145卷 / 2-3期
关键词：
D O I：
10.1016/0039-6028(84)90090-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：390 / 406
页数：17
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