PLASMA DEPOSITED ORGANO-SILICON POLYMERS - DEPOSITION, CHARACTERIZATION, AND APPLICATION

被引：0

作者：

NGUYEN, VS ^{[1
]}

UNDERHILL, J ^{[1
]}

FRIDMANN, S ^{[1
]}

PAN, P ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C310 / C310

页数：1

共 50 条

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[10] PREPARATION OF SILICON CONTAINING POLYMERS .3. SYNTHESIS AND CHARACTERIZATION OF ORGANO-SILICON AZOPOLYAMIDES
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