ANALYSIS OF CORROSION ON ALUMINUM DOUBLE-LAYER METALLIZATION

被引:6
|
作者
WADA, T
HIGUCHI, H
AJIKI, T
机构
[1] Matsushita Electronics Corp, QA Cent, Semiconductor Group, Nagaoka, Jpn, Matsushita Electronics Corp, QA Cent Semiconductor Group, Nagaoka, Jpn
关键词
D O I
10.1149/1.2108580
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
5
引用
收藏
页码:362 / 366
页数:5
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