THERMAL AND PHOTOINDUCED REACTIONS OF POLYMER RADICALS IN GAMMA-IRRADIATED POLY(ALKYL METHACRYLATE)

被引:31
|
作者
TANAKA, M
YOSHIDA, H
ICHIKAWA, T
机构
[1] Hokkaido University, Kita-ku, Sapporo
关键词
Chain scission; Degradation; ESR; Lithography; Poly(ethyl methacrylate); Poly(metha methacrylate); Radical; Radiolysis; Resist;
D O I
10.1295/polymj.22.835
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Thermal and photo-induced reactions of radical species generated by γ-irradiation of poly(methyl methacrylate) and poly(ethyl methacrylate) have been investigated by means of ESR spectroscopy. The γ-irradiation at cryogenic temperature leads to the formation of three major radical species, side chain —COOCnH2n+1— anion radicals and —COOCHCn-1 H2n-1 radicals, and main chain —Ch— radicals. Cation radicals are immediately converted to the neutral radicals by proton transfer to the polymer molecules. Illumination of the polymer anion radicals with visible light leads to electron detachment or the elimination of ester alkyl groups to form alkyl radicals. Illumination with UV light leads to the conversion of the —COOCHCn-1 H2n-1 radicals to acyl-type —C=O radicals. Both the —COOCHCn-1 H2n-1 and the —C=O radicals are the precursor of scission-type C(CH3)(COOCnH 2n+1)CH2 - radicals. © 1990, The Society of Polymer Science, Japan. All rights reserved.
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页码:835 / 841
页数:7
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