EFFECT OF BOMBARDMENT WITH LOW-ENERGY AR+ IONS ON ELECTRON-SCATTERING IN ACCUMULATION LAYERS OF NORMAL-GE

被引:0
|
作者
GORKUN, YI [1 ]
KOROBANOV, VL [1 ]
LYSENKO, VS [1 ]
NOVOMINSKII, VA [1 ]
TURCHANIKOV, VI [1 ]
机构
[1] ACAD SCI UKSSR,INST SEMICOND,KIEV,UKSSR
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1977年 / 41卷 / 01期
关键词
D O I
10.1002/pssa.2210410142
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:339 / 346
页数:8
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