KINETICS OF RAPID THERMAL-OXIDATION OF (100) SI

被引：0
|
作者：
MURALI, V [1 ]
MURARKA, SP [1 ]
机构：
[1] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,DEPT MAT ENGN,TROY,NY 12181
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C118 / C118
页数：1
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