COMPLEX-FORMATION AT PHOSPHORUS DIFFUSION INTO SILICON

被引：0
|
作者：
ALEKSANDROV, OV
ASHKINADZE, NV
TUMAROV, RZ
机构：
来源：
FIZIKA TVERDOGO TELA | 1984年 / 26卷 / 02期
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D O I：
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中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
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页码：632 / 634
页数：3
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