INTERACTIONS IN METALLIZATION SYSTEMS FOR INTEGRATED-CIRCUITS

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作者：

MURARKA, SP ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF METALS | 1983年 / 35卷 / 12期

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中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

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页码：69 / 69

页数：1

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