KINETIC FACTORS IN CHEMICAL VAPOR-DEPOSITION OF CARBON FROM METHANE

被引：5
|
作者：
LIEBERMAN, ML [1 ]
机构：
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
来源：
CARBON | 1975年 / 13卷 / 03期
关键词：
D O I：
10.1016/0008-6223(75)90240-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：243 / 244
页数：2
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