TEMPERATURE AND SUBSTRATE DEPENDENCE OF THE MORPHOLOGY OF GLOW-DISCHARGE-DEPOSITED A-SI-H

被引：5
|
作者：
ZENTAI, G
POGANY, L
机构：
来源：
THIN SOLID FILMS | 1984年 / 116卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(84)90444-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：251 / 257
页数：7
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