IONIZATION WAVES IN LOW-PRESSURE SF6 GAS

被引：14
|
作者：
ISHIKAWA, I
MATSUMOTO, M
SUGANOMATA, S
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1984年 / 17卷 / 01期
关键词：
D O I：
10.1088/0022-3727/17/1/013
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：85 / 97
页数：13
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