CERAMIC GREEN SHEET PUNCHER USING MULTILAYER PIEZOELECTRIC ACTUATOR

被引：0
|
作者：
YOSHIDA, K
YOSHIURA, T
SHIMADA, Y
机构：
[1] NEC CORP,DIV TECH SERV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
[2] NEC CORP,CTR MAT DEV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷
关键词：
D O I：
10.7567/JJAPS.26S2.186
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：186 / 187
页数：2
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