REACTIVE STICKING COEFFICIENT OF SILANE ON THE SI(111)-(7X7) SURFACE

被引：62
|
作者：
GATES, SM
GREENLIEF, CM
BEACH, DB
KUNZ, RR
机构：
来源：
CHEMICAL PHYSICS LETTERS | 1989年 / 154卷 / 06期
关键词：
D O I：
10.1016/0009-2614(89)87141-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：505 / 510
页数：6
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