REALIZATION OF POROUS SILICON MEMBRANES FOR GAS SENSOR APPLICATIONS

被引：35
|
作者：
TALIERCIO, T
DILHAN, M
MASSONE, E
GUE, AM
FRAISSE, B
FOUCARAN, A
机构：
[1] CITA,F-31700 BLAGNAC,FRANCE
[2] CNRS,LAAS,F-31077 TOULOUSE,FRANCE
[3] UNIV MONTPELLIER 2,LAMMI,F-34095 MONTPELLIER 5,FRANCE
来源：
THIN SOLID FILMS | 1995年 / 255卷 / 1-2期
关键词：
DIFFUSION; SENSORS; SILICON; X-RAY DIFFRACTION;
D O I：
10.1016/0040-6090(94)05616-L
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper we report on the elaboration of porous silicon membranes for gas sensor applications. We attempted to replace the Teflon membrane of an oxygen sensor by a porous silicon membrane. The sensor was originally designed to measure the concentration of oxygen dissolved in aqueous solutions and had to be slightly modified. Diffusion times in the range of 10 min have been found.
引用
收藏
页码：310 / 312
页数：3
相关论文
共 50 条
  • [1] POROUS SILICON MEMBRANES FOR GAS-SENSOR APPLICATIONS
    TALIERCIO, T
    DILHAN, M
    MASSONE, E
    FOUCARAN, A
    GUE, AM
    BRETAGNON, T
    FRAISSE, B
    MONTES, L
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 43 - 46
  • [2] Nanostructured porous silicon for gas sensor applications
    Di Francia, G
    Della Noce, M
    La Ferrara, V
    Lancellotti, L
    Morvillo, P
    Quercia, L
    [J]. MATERIALS SCIENCE AND TECHNOLOGY, 2002, 18 (07) : 767 - 771
  • [3] Porous silicon layers used for gas sensor applications
    Foucaran, A
    PascalDelannoy, F
    Giani, A
    Sackda, A
    Combette, P
    Boyer, A
    [J]. THIN SOLID FILMS, 1997, 297 (1-2) : 317 - 320
  • [4] Porous silicon for sensor applications
    Nassiopoulou, AG
    [J]. NANOSTRUCTURED AND ADVANCED MATERIALS FOR APPLICATIONS IN SENSOR, OPTOELECTRONIC AND PHOTOVOLTAIC TECHNOLOGY, 2005, 204 : 189 - 204
  • [5] Study of porous silicon gas sensor
    Kwok, WM
    Bow, YC
    Chan, WY
    Poon, MC
    Han, PG
    Wong, H
    [J]. 1999 IEEE HONG KONG ELECTRON DEVICES MEETING, PROCEEDINGS, 1999, : 80 - 83
  • [6] Porous silicon ammonia gas sensor
    Chaillou, A.
    Charrier, J.
    Lorrain, N.
    Sarret, M.
    Haji, L.
    [J]. OPTICAL SENSING II, 2006, 6189
  • [7] Porous silicon membranes and their applications: Recent advances
    Vercauteren, Roselien
    Scheen, Gilles
    Raskin, Jean-Pierre
    Francis, Laurent A.
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2021, 318
  • [8] Realization of porous silicon photonic bandgap optical sensor devices
    Patel, P. N.
    Mishra, Vivekanand
    [J]. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2014, 16 (3-4): : 269 - 275
  • [9] Gas detection with a porous silicon based sensor
    Baratto, C
    Comini, E
    Faglia, G
    Sberveglieri, G
    Di Francia, G
    De Filippo, F
    La Ferrara, V
    Quercia, L
    Lancellotti, L
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) : 257 - 259
  • [10] Electrostatic gas sensor with a porous silicon diaphragm
    Kim, Hyeok-Gi
    Lee, Ki-Won
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2015, 219 : 10 - 16
12345