LASER-INDUCED CVD OF TITANIUM DIBORIDE AND THE INFLUENCE OF ATOMIC-HYDROGEN

被引：8
|
作者：
ELDERS, J
VANVOORST, JDW
机构：
[1] Laboratory for Physical Chemistry, University of Amsterdam, 1018 ZW Amsterdam
来源：
APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(93)90516-E
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
CO2 laser-induced chemical vapor deposition of titanium diboride (TiB2) has been performed on mullite substrates by the hydrogen reduction of titanium tetrachloride and boron trichloride. The influence of the hydrogen concentration on the morphology, growth rate and nucleation rate will be discussed. These results suggest that atomic hydrogen may play an important role in the deposition process. An atomic hydrogen source, a hot filament, has therefore been constructed. The results of the hot filament-enhanced depositions on thermally oxidized silicon will be presented.
引用
收藏
页码：267 / 271
页数：5
相关论文
共 50 条
  • [1] DETECTION OF ATOMIC-HYDROGEN BY 2-COLOR LASER-INDUCED GRATING SPECTROSCOPY
    GRAY, JA
    GOLDSMITH, JEM
    TREBINO, R
    OPTICS LETTERS, 1993, 18 (06) : 444 - 446
  • [2] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE
    ELDERS, J
    VANVOORST, JDW
    APPLIED SURFACE SCIENCE, 1992, 54 : 135 - 140
  • [3] MEASUREMENT OF ATOMIC-HYDROGEN DENSITIES AND VELOCITIES BY LASER-INDUCED FLUORESCENCE AT L-ALPHA
    BOGEN, P
    DREYFUS, RW
    LIE, YT
    LANGER, H
    JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) : 75 - 80
  • [4] LASER-INDUCED CHEMICAL-VAPOR-DEPOSITION OF TITANIUM DIBORIDE
    ELDERS, J
    VANVOORST, JDW
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (01) : 553 - 562
  • [5] LASER SPECTROSCOPY OF ATOMIC-HYDROGEN
    FERGUSON, AI
    TOLCHARD, JM
    CONTEMPORARY PHYSICS, 1987, 28 (04) : 383 - 405
  • [6] COMPARISON OF VARIOUS 2-PHOTON EXCITATION SCHEMES FOR LASER-INDUCED FLUORESCENCE SPECTROSCOPY IN ATOMIC-HYDROGEN
    CZARNETZKI, U
    MIYAZAKI, K
    KAJIWARA, T
    MURAOKA, K
    MAEDA, M
    DOBELE, HF
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1994, 11 (11) : 2155 - 2162
  • [7] MEASUREMENT OF ATOMIC-HYDROGEN IN A HOT-FILAMENT REACTOR BY 2-PHOTON LASER-INDUCED FLUORESCENCE
    CHENEVIER, M
    CUBERTAFON, JC
    CAMPARGUE, A
    BOOTH, JP
    DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) : 587 - 592
  • [8] Atomic Hydrogen and Diatomic Titanium-Monoxide Molecular Spectroscopy in Laser-induced Plasma
    Parigger, Christian G.
    Woods, Alexander C.
    ATOMIC PROCESSES IN PLASMAS (APIP 2016), 2017, 1811
  • [9] LASER-INDUCED VAPOR-PHASE SYNTHESES OF BORON AND TITANIUM DIBORIDE POWDERS
    CASEY, JD
    HAGGERTY, JS
    JOURNAL OF MATERIALS SCIENCE, 1987, 22 (02) : 737 - 744
  • [10] LASER DETECTION AND EXCITATION OF ATOMIC-HYDROGEN
    BJORKLUND, GC
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (09): : 1094 - 1094
12345