ANALYSIS OF CARBON CONTENT AND DISTRIBUTION IN A-SI1-XCX-H FILMS BY RESONANT SCATTERING

被引：8
|
作者：
SIE, SH
MCKENZIE, DR
SMITH, GB
RYAN, CG
机构：
[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA
[2] NEW S WALES INST TECHNOL,DEPT PHYS,BROADWAY,NSW 2007,AUSTRALIA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期
关键词：
D O I：
10.1016/0168-583X(86)90382-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：632 / 635
页数：4
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