INTERFEROMETRIC STATISTICAL MEASUREMENT OF SURFACE-ROUGHNESS

被引：7

作者：

LORINCZ, E

RICHTER, P

ENGARD, F

机构：

来源：

APPLIED OPTICS | 1986年 / 25卷 / 16期

关键词：

D O I：

10.1364/AO.25.002778

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2778 / 2784

页数：7

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