REMOTE CATALYTIC ACTION OF PLATINUM AND PALLADIUM ON OXIDATION OF SINGLE-CRYSTAL SILICON

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作者：

STRUKOV, VM

VORONTSOV, ES

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JOURNAL OF APPLIED CHEMISTRY OF THE USSR | 1976年 / 49卷 / 05期

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O69 [应用化学];

学科分类号：

081704 ;

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页码：1024 / 1026

页数：3

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