Photofield-Effect in Amorphous In-Ga-Zn-O (a-IGZO) Thin-Film Transistors

被引:86
|
作者
Fung, Tze-Ching [1 ]
Chuang, Chiao-Shun [3 ]
Nomura, Kenji [2 ]
Shieh, Han-Ping David [3 ]
Hosono, Hideo [2 ]
Kanicki, Jerzy [1 ]
机构
[1] Univ Michigan, Dept Elect & Comp Sci, 1301 Beal Ave, Ann Arbor, MI 1301 USA
[2] Tokyo Inst Technol, Frontier Collaborat Res Ctr, ERATO SORST JST, Mat & Struct Lab, Yokohama, Kanagawa 2268503, Japan
[3] Natl Chaio Tung Univ, Dept Photon & Display Inst, Hsinchu 30010, Taiwan
关键词
Metal oxide semiconductor; InGaZnO; TFT; Photofield effect;
D O I
10.1080/15980316.2008.9652066
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We studied both the wavelength and intensity dependent photo-responses (photofield-effect) in amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs). During the a-IGZO TFT illumination with the wavelength range from 460 similar to 660 nm (visible range), the off-state drain current (I-DS_off) only slightly increased while a large increase was observed for the wavelength below 400 nm. The observed results are consistent with the optical gap of similar to 3.05eV extracted from the absorption measurement. The a-IGZO TFT properties under monochromatic illumination (lambda = 420nm) with different intensity was also investigated and I-DS_off was found to increase with the light intensity. Throughout the study, the field-effect mobility (mu(eff)) is almost unchanged. But due to photo-generated charge trapping, a negative threshold voltage (V-th) shift is observed. The mathematical analysis of the photofield-effect suggests that a highly efficient UV photocurrent conversion process in TFT off-region takes place. Finally, a-IGZO mid-gap density-of-states (DOS) was extracted and is more than an order of magnitude lower than reported value for hydrogenated amorphous silicon (a-Si:H), which can explain a good switching properties observed for a-IGZO TFTs.
引用
收藏
页码:21 / 29
页数:9
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