COMPENSATION IN GAAS BY ION-BOMBARDMENT

被引:0
|
作者
DIETRICH, HB [1 ]
机构
[1] USN RES LAB,DIV ELECTR TECHNOL,WASHINGTON,DC 20375
来源
REPORT OF NRL PROGRESS | 1976年 / JAN期
关键词
D O I
暂无
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
引用
收藏
页码:3 / 6
页数:4
相关论文
共 50 条
  • [1] RECOIL IMPLANTATION OF SI INTO GAAS BY AS ION-BOMBARDMENT
    YAMAMOTO, Y
    FUJIMA, S
    TAKADA, H
    SEGAWA, Y
    ISHIBASHI, K
    SHIM, TE
    ITOH, T
    SUZUKI, S
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 392 - 397
  • [2] THE EFFECT OF ION-BOMBARDMENT ON THE SURFACE-CHEMISTRY OF GAAS
    EPP, J
    DILLARD, JG
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1987, 193 : 159 - COLL
  • [3] ION-BOMBARDMENT OF RESISTS
    ADESIDA, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 79 - 86
  • [4] PROSPECTS FOR ION-BOMBARDMENT AND ION-IMPLANTATION IN GAAS AND INP DEVICE FABRICATION
    MORGAN, DV
    EISEN, FH
    EZIS, A
    IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1981, 128 (04): : 109 - 130
  • [5] ION-BOMBARDMENT OF POLYETHYLENE
    BEARDMORE, K
    SMITH, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 102 (1-4): : 223 - 227
  • [6] ION-BOMBARDMENT CHEMISTRY
    WOLF, GK
    NUCLEAR INSTRUMENTS & METHODS, 1976, 139 (DEC15): : 147 - 151
  • [7] ION-BOMBARDMENT OF INSULATORS
    PRIMAK, W
    JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) : 238 - 245
  • [8] COMPOSITION CHANGES IN GAAS DUE TO LOW-ENERGY ION-BOMBARDMENT
    SINGER, IL
    MURDAY, JS
    COOPER, LR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 725 - 725
  • [9] EFFECTS OF LOW-ENERGY AR+ ION-BOMBARDMENT ON GAAS
    VASEASHTA, A
    ELSHABINIRIAD, A
    BURTON, LC
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1991, 9 (04): : 489 - 500
  • [10] ION-BOMBARDMENT EFFECTS IN POLYMERS
    BROWN, WL
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 98 (1-4): : 115 - 137