DIGITAL PROCESSING OF BEAM SIGNALS IN A VARIABLY SHAPED ELECTRON-BEAM LITHOGRAPHY SYSTEM

被引：0
|
作者：
MATSUOKA, G [1 ]
YOKOUCHI, H [1 ]
OKUMURA, M [1 ]
MATSUZAKA, T [1 ]
SAITOU, N [1 ]
NAKAMURA, K [1 ]
机构：
[1] HITACHI LTD,NAKA WORKS,KATSUTA,IBARAKI 312,JAPAN
来源：
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 537卷
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
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页码：34 / 41
页数：8
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