SYNCHROTRON LIGHT FOR X-RAY-LITHOGRAPHY

被引：0
|
作者：
ROBINSON, AL
机构：
来源：
SCIENCE | 1985年 / 228卷 / 4695期
关键词：
D O I：
10.1126/science.228.4695.39
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：39 / 40
页数：2
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